pH Sensitivity Improvement on 8 nm Thick Hafnium Oxide by Post Deposition Annealing
Lai, Chao-Sung, Yang, Chia-Ming, Lu, Tseng-FuVolume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2163550
File:
PDF, 229 KB
english, 2006