Stress-Driven and Carbon-Assisted Growth of $ \hbox{SiO}_{x}\hbox{N}_{y}$ Nanowires on Photoresist-Derived Carbon Microelectrode
Zhang, Lei, Shi, Tielin, Tang, Zirong, Liu, Dan, Xi, ShuangVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2211570
Date:
December, 2012
File:
PDF, 761 KB
english, 2012