SPIE Proceedings [SPIE Electronic Imaging 2004 - San Jose,...

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SPIE Proceedings [SPIE Electronic Imaging 2004 - San Jose, CA (Sunday 18 January 2004)] Practical Holography XVIII: Materials and Applications - Holographic method for obtaining images of two-dimensional objects with limiting high-resolution for extreme short-wave lithography problems

Koreshev, Sergey N., Ratushnyi, Vladilsav P., Jeong, Tung H., Bjelkhagen, Hans I.
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Volume:
5290
Year:
2004
Language:
english
DOI:
10.1117/12.525988
File:
PDF, 362 KB
english, 2004
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