[IEEE The Pacific Rim Conference on Lasers and Electro-Optics (CLEO/PACIFIC RIM) - Shanghai, China (2009.08.30-2009.08.3)] 2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics - Minimal continuous thickness and microstructure of Mo thin films
Liang, Guangxing, Fan, Ping, Zhang, Dongping, Cai, Xingmin, Zheng, Zhuanghao, Ru, LiliYear:
2009
Language:
english
DOI:
10.1109/cleopr.2009.5292428
File:
PDF, 272 KB
english, 2009