Ellipsometric determination of optical constants for...

Journal of Applied Physics 1998 Vol. 83; Iss. 6

Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

Herzinger, C. M., Johs, B., McGahan, W. A., Woollam, J. A., Paulson, W.
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Volume:
83
Year:
1998
Language:
english
DOI:
10.1063/1.367101
File:
PDF, 479 KB
english, 1998
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