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Pore formation in silicon by wet etching using micrometre-sized metal particles as catalysts
Lee, Chia-Lung, Tsujino, Kazuya, Kanda, Yuji, Ikeda, Shigeru, Matsumura, MichioVolume:
18
Year:
2008
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b715639a
File:
PDF, 223 KB
english, 2008