Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer
Cui, Feng, Liu, Wu, Chen, Wenyuan, Zhang, Weiping, Wu, XiaoshengVolume:
11
Language:
english
Journal:
Sensors
DOI:
10.3390/s111211206
Date:
November, 2011
File:
PDF, 1.63 MB
english, 2011