Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope...

Sensors 2009 / 04 Vol. 9; Iss. 4

Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

Shakoor, Rana Iqtidar, Bazaz, Shafaat Ahmed, Kraft, Michael, Lai, Yongjun, ul Hassan, Muhammad Masood
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Volume:
9
Language:
english
Journal:
Sensors
DOI:
10.3390/s90402389
Date:
April, 2009
File:
PDF, 1.74 MB
english, 2009
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