Influence of Operating Parameters on Target Erosion of Rectangular Planar DC Magnetron
Qiu, Qingquan, Li, Qingfu, Su, Jingjing, Jiao, Yu, Finley, JimVolume:
36
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2008.927379
Date:
August, 2008
File:
PDF, 931 KB
english, 2008