[IEEE 2006 IEEE International Frequency Control Symposium and Exposition - Miami, FL, USA (2006.06.4-2006.06.7)] 2006 IEEE International Frequency Control Symposium and Exposition - A 10MHz piezoresistive MEMS resonator with high Q
Beek, J.t.m., Steeneken, P.G., Giesbers, B.Year:
2006
Language:
english
DOI:
10.1109/freq.2006.275432
File:
PDF, 741 KB
english, 2006