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A $\Delta \Sigma$ Interface for MEMS Accelerometers Using Electrostatic Spring Constant Modulation for Cancellation of Bondwire Capacitance Drift
Lajevardi, Pedram, Petkov, Vladimir P., Murmann, BorisVolume:
48
Language:
english
Journal:
IEEE Journal of Solid-State Circuits
DOI:
10.1109/jssc.2012.2218721
Date:
January, 2013
File:
PDF, 1.82 MB
english, 2013