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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Surface micromachined micro-diaphragm pressure sensors
Sugiyama, S., Shimaoka, K., Tabata, O.Year:
1991
Language:
english
DOI:
10.1109/sensor.1991.148834
File:
PDF, 465 KB
english, 1991