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[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Novel Micro Thermal Shear Stress Sensor with a Cavity underneath
Shi, Shali, Chen, Dapeng, Bai, Honglei, Ding, Deyong, Ou, Yi, Ye, Tianchun, Shen, GongxinYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334801
File:
PDF, 4.59 MB
english, 2006