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Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications
Anand, Sindhu, Sutanto, Jemmy, Baker, Michael S., Okandan, Murat, Muthuswamy, JitVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2203789
Date:
October, 2012
File:
PDF, 1.53 MB
english, 2012