Growth of SiC Thin Films on (100) and (111) Silicon by...

MRS Proceedings 1999 / 1 Vol. 572

Growth of SiC Thin Films on (100) and (111) Silicon by Pulsed Laser Deposition Combined with a Vacuum Annealing Process

Huang, Jipo, Wang, Lianwei, Wen, Jun, Wang, Yuxia, Lin, Chenglu, Zetterling, Carl-Mikael, Ostling, Mikael
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Volume:
572
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-572-207
Date:
January, 1999
File:
PDF, 608 KB
english, 1999
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