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SiC Cleaning Method by Use of Dilute HCN Aqueous Solutions
Madani, Mohammad, Liu, Yueh-Ling, Takahashi, Masao, Iwasa, Hitoo, Kobayashi, HikaruVolume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2976213
File:
PDF, 434 KB
english, 2008