[IEEE IEEE Ultrasonics Symposium, 2004 - Montreal, Canada (23-27 Aug. 2004)] IEEE Ultrasonics Symposium, 2004 - Fabrication of MEMS ZnO dome-shaped-diaphragm transducers for high frequency ultrasonic imaging
Guo-Hua Feng,, Sharp, C.C., Qifa Zhou,, Wei Pang,, Eun Sok Kim,, Shung, K.K.Volume:
3
Year:
2004
Language:
english
DOI:
10.1109/ultsym.2004.1418214
File:
PDF, 615 KB
english, 2004