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Indium channel implant for improved short-channel behavior of submicrometer NMOSFETs
Shahidi, G.G., Davari, B., Bucelot, T.J., Ronsheim, P.A., Coane, P.J., Pollack, S., Blair, C.R., Clark, B., Hansen, H.H.Volume:
14
Year:
1993
Language:
english
DOI:
10.1109/55.225595
File:
PDF, 227 KB
english, 1993