Indium channel implant for improved short-channel behavior...

Indium channel implant for improved short-channel behavior of submicrometer NMOSFETs

Shahidi, G.G., Davari, B., Bucelot, T.J., Ronsheim, P.A., Coane, P.J., Pollack, S., Blair, C.R., Clark, B., Hansen, H.H.

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Volume:

Year:

1993

Language:

english

DOI:

10.1109/55.225595

File:

PDF, 227 KB

english, 1993

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