Development of an Efficient Method for the Removal of Silane Compounds from Exhaust Air
Hickstein, B., Meynhardt, B., Niemeier, O., Weber, D.Volume:
35
Language:
english
Journal:
Chemical Engineering & Technology
DOI:
10.1002/ceat.201200222
Date:
November, 2012
File:
PDF, 312 KB
english, 2012