Fabrication of SiC nanopillars by inductively coupled SF...

Journal of Physics D Applied Physics 2012 / 06 Vol. 45; Iss. 23

Fabrication of SiC nanopillars by inductively coupled SF 6 /O 2 plasma etching

Choi, J H, Latu-Romain, L, Bano, E, Dhalluin, F, Chevolleau, T, Baron, T
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Volume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/23/235204
Date:
June, 2012
File:
PDF, 2.89 MB
english, 2012
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