![](/img/cover-not-exists.png)
Fabrication of SiC nanopillars by inductively coupled SF 6 /O 2 plasma etching
Choi, J H, Latu-Romain, L, Bano, E, Dhalluin, F, Chevolleau, T, Baron, TVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/23/235204
Date:
June, 2012
File:
PDF, 2.89 MB
english, 2012