Plasma physics and radiation hydrodynamics in developing an...

Physics of Plasmas 2008 Vol. 15; Iss. 5

Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

Nishihara, Katsunobu, Sunahara, Atsushi, Sasaki, Akira, Nunami, Masanori, Tanuma, Hajime, Fujioka, Shinsuke, Shimada, Yoshinori, Fujima, Kazumi, Furukawa, Hiroyuki, Kato, Takako, Koike, Fumihiro, More
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Volume:
15
Year:
2008
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.2907154
File:
PDF, 1.63 MB
english, 2008
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