Retarded oxygen diffusion in heavily phosphorus-doped...

Journal of Physics Condensed Matter 2012 / 12 Vol. 24; Iss. 49

Retarded oxygen diffusion in heavily phosphorus-doped Czochralski silicon: experiments and first-principles calculations

Gao, Chao, Wang, Zhenhui, Liang, Xingbo, Tian, Daxi, Liu, Hongyan, Ma, Xiangyang, Yang, Deren
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Volume:
24
Language:
english
Journal:
Journal of Physics: Condensed Matter
DOI:
10.1088/0953-8984/24/49/495802
Date:
December, 2012
File:
PDF, 720 KB
english, 2012
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