Stress and piezoelectric properties of aluminum nitride...

Journal of Applied Physics 2001 Vol. 89; Iss. 11

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

Dubois, Marc-Alexandre, Muralt, Paul
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Volume:
89
Year:
2001
Language:
english
DOI:
10.1063/1.1359162
File:
PDF, 390 KB
english, 2001
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