[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Monolithic integrated surface micromachined pressure sensors with analog on-chip linearization and temperature compensation
Trieu, H.K., Knier, M., Koster, O., Kappert, H., Schmidt, M., Mokwa, W.Year:
2000
Language:
english
DOI:
10.1109/memsys.2000.838576
File:
PDF, 290 KB
english, 2000