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[IEEE 2012 IEEE International SOI Conference - Napa, CA, USA (2012.10.1-2012.10.4)] 2012 IEEE International SOI Conference (SOI) - Evaluation of sSOI wafers for 22nm node and beyond
Allibert, F., Cheng, K., Vinet, M., Schwarzenbach, W., Khakifirooz, A., Ecarnot, L., Nguyen, B. Y., Doris, B.Year:
2012
Language:
english
DOI:
10.1109/soi.2012.6404397
File:
PDF, 729 KB
english, 2012