Fabrication of Copper Damascene Patterns on Polyimide Using...

Fabrication of Copper Damascene Patterns on Polyimide Using Direct Metallization on Trench Templates Generated by Imprint Lithography

Matsumura, Yasufumi, Enomoto, Yasushi, Tsuruoka, Takaaki, Akamatsu, Kensuke, Nawafune, Hidemi
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Volume:
26
Language:
english
Journal:
Langmuir
DOI:
10.1021/la101350f
Date:
July, 2010
File:
PDF, 1.03 MB
english, 2010
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