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Fabrication of Copper Damascene Patterns on Polyimide Using Direct Metallization on Trench Templates Generated by Imprint Lithography
Matsumura, Yasufumi, Enomoto, Yasushi, Tsuruoka, Takaaki, Akamatsu, Kensuke, Nawafune, HidemiVolume:
26
Language:
english
Journal:
Langmuir
DOI:
10.1021/la101350f
Date:
July, 2010
File:
PDF, 1.03 MB
english, 2010