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Deposition Control of Parylene-A film with Quartz Crystal Microbalance (QCM)
Lee, Ga-Yeon, ko, Hyuk, Choi, Yong-Hwan, Pyun, Jae-ChulVolume:
47
Year:
2012
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.321
File:
PDF, 693 KB
english, 2012