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Nitrogen-passivated dielectric/InGaAs interfaces with sub-nm equivalent oxide thickness and low interface trap densities
Chobpattana, Varistha, Son, Junwoo, Law, Jeremy J. M., Engel-Herbert, Roman, Huang, Cheng-Ying, Stemmer, SusanneVolume:
102
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4776656
File:
PDF, 1.22 MB
english, 2013