Interfaces and Composition Profiles in Metal–Sulfide...

Chemistry of Materials 2013 / 02 Vol. 25; Iss. 3

Interfaces and Composition Profiles in Metal–Sulfide Nanolayers Synthesized by Atomic Layer Deposition

Thimsen, Elijah, Baryshev, Sergey V., Martinson, Alex B. F., Elam, Jeffrey W., Veryovkin, Igor V., Pellin, Michael J.
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Volume:
25
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm3027225
Date:
February, 2013
File:
PDF, 1.29 MB
english, 2013
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