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Large-size P-type silicon microchannel plates prepared by photoelectrochemical etching
Yuan, DingVolume:
8
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3158616
Date:
July, 2009
File:
PDF, 1.04 MB
english, 2009