Fabrication of porous material for micro component...

Microelectronic Engineering 2012 / 10 Vol. 98

Fabrication of porous material for micro component application by direct X-ray lithography and sintering

Tirta, Andy, Baek, Eung Ryul, Chang, Suk Sang, Kim, Jong Hyun
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.05.016
Date:
October, 2012
File:
PDF, 887 KB
english, 2012
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