Ion-beam-induced epitaxial crystallization and...

Ion-beam-induced epitaxial crystallization and amorphization in silicon

Francesco Priolo, Emanuele Rimini
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Volume:
5
Year:
1990
Language:
english
DOI:
10.1016/0920-2307(90)90003-l
File:
PDF, 3.61 MB
english, 1990
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