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[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Computer simulation of polysilicon piezoresistive pressure sensors
Liu Xiaowei,, Li Xin,, Wang Wei,, Wang Xilian,, Che Wei,, Liu Zhenmao,, Fan Maojun,Year:
1998
Language:
english
DOI:
10.1109/icsict.1998.786503
File:
PDF, 238 KB
english, 1998