Sol−Gel Fabrication of Dielectric HfO 2 Nano-Films; Formation of Uniform, Void-Free Layers and Their Superior Electrical Properties
Aoki, Yoshitaka, Kunitake, Toyoki, Nakao, AikoVolume:
17
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm048971r
Date:
January, 2005
File:
PDF, 447 KB
english, 2005