2 nm Quantum Optical Lithography
Pavel, E., Jinga, S., Andronescu, E., Vasile, B.S., Kada, G., Sasahara, A., Tosa, N., Matei, A., Dinescu, M., Dinescu, A., Vasile, O.R.Volume:
291
Language:
english
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2012.10.079
Date:
March, 2013
File:
PDF, 1.18 MB
english, 2013