Distinct nonequilibrium plasma chemistry of C2 affecting the synthesis of nanodiamond thin films from C2H2 (1%)/H2/Ar-rich plasmas
Gordillo-Vazquez, F. J., Albella, J. M.Volume:
94
Year:
2003
Language:
english
DOI:
10.1063/1.1617362
File:
PDF, 345 KB
english, 2003