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Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma treatment
Layadi, N., Roca i Cabarrocas, P., Drévillon, B., Solomon, I.Volume:
52
Language:
english
Journal:
Physical Review B
DOI:
10.1103/physrevb.52.5136
Date:
August, 1995
File:
PDF, 521 KB
english, 1995