Depth Profiling and Compositional Study of Implanted...

Plasma Processes and Polymers 2007 Vol. 4; Iss. Supplement

Depth Profiling and Compositional Study of Implanted Surface Layers and Nitride Multilayers by a Combined GDOES, NRA and RBS Analysis

Cristina Fernández-Ramos, Javier García-López, Asunción Fernández, Rosario Martínez, Jose A. García, Rafael J. Rodríguez
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Volume:
4
Year:
2007
Language:
english
DOI:
10.1002/ppap.200732004
File:
PDF, 325 KB
english, 2007
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