Barrier effect of e-beam evaporated tungsten interlayer in...

Barrier effect of e-beam evaporated tungsten interlayer in Al/W/PtSi metallization layer

Bi-Shiou Chiou, Han-Sang Lo, Peng-Heng Chang
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Volume:
17
Language:
english
DOI:
10.1007/bf02652125
Date:
September, 1988
File:
PDF, 1.90 MB
english, 1988
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