Barrier effect of e-beam evaporated tungsten interlayer in Al/W/PtSi metallization layer
Bi-Shiou Chiou, Han-Sang Lo, Peng-Heng ChangVolume:
17
Language:
english
DOI:
10.1007/bf02652125
Date:
September, 1988
File:
PDF, 1.90 MB
english, 1988