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Silicon ingot diameter modeling in Czochralski process and its dynamic simulation
Jin Soo Park, Minkyo Seo, Hyun Jung Oh, Jae Hak JungVolume:
25
Language:
english
DOI:
10.1007/s11814-008-0104-4
Date:
July, 2008
File:
PDF, 696 KB
english, 2008