Post-hydrogenation of CVD deposited a-Si films

Post-hydrogenation of CVD deposited a-Si films

Nicole Sol, Daniel Kaplan, Dominique Dieumegard, Daniel Dubreuil
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Volume:
35-36
Year:
1980
Language:
english
DOI:
10.1016/0022-3093(80)90609-2
File:
PDF, 399 KB
english, 1980
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