Preparation of amorphous SiF alloys by RF glow-discharge

Journal of Non-Crystalline Solids 1982 Vol. 52; Iss. 1-3

Preparation of amorphous SiF alloys by RF glow-discharge

Zishang Ding, Xiufang Wang, Zhonghua Jiang, Yuquan Ding
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Volume:
52
Year:
1982
Language:
english
DOI:
10.1016/0022-3093(82)90325-8
File:
PDF, 449 KB
english, 1982
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