Thickness dependent properties of sputtered a-Si:H from...

Journal of Non-Crystalline Solids 1983 Vol. 59-60; Iss. part-P1

Thickness dependent properties of sputtered a-Si:H from Raman and conductivity measurement

Bernard Ranchoux, Didier Jousse, Jean-Claude Bruyere, Alain Deneuville
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Volume:
59-60
Year:
1983
Language:
english
DOI:
10.1016/0022-3093(83)90552-5
File:
PDF, 182 KB
english, 1983
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