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Field effect in dc-sputtered a-Si:H in structure using SiNx prepared in situ
V. Šmíd, N.M. Dung, L. Štourač, K. JurekVolume:
70
Year:
1985
Language:
english
DOI:
10.1016/0022-3093(85)90087-0
File:
PDF, 438 KB
english, 1985