Influence of the hydrogen content on the physical...

Influence of the hydrogen content on the physical properties of magnetron sputtered amorphous silicon

F. Demichelis, E. Mezzetti, P. Rava, A. Tagliaferro, E. Tresso, G.A. Della Mea, P. Mazzoldi
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Volume:
77-78
Year:
1985
Language:
english
DOI:
10.1016/0022-3093(85)90655-6
File:
PDF, 160 KB
english, 1985
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