Influence of the hydrogen content on the physical properties of magnetron sputtered amorphous silicon
F. Demichelis, E. Mezzetti, P. Rava, A. Tagliaferro, E. Tresso, G.A. Della Mea, P. MazzoldiVolume:
77-78
Year:
1985
Language:
english
DOI:
10.1016/0022-3093(85)90655-6
File:
PDF, 160 KB
english, 1985