Boron diffusion in amorphous silicon analized by SIMS and...

Journal of Non-Crystalline Solids 1985 Vol. 77-78; Iss. part-P1

Boron diffusion in amorphous silicon analized by SIMS and temperature dependent conductivity

G Bilger, C.E Nebel, G.H Bauer, H.-D Mohring
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Volume:
77-78
Year:
1985
Language:
english
DOI:
10.1016/0022-3093(85)90708-2
File:
PDF, 172 KB
english, 1985
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