Hydrogen content and optical properties of LPCVD amorphous silicon films
C. Manfredotti, G. Scarano, G. Della Mea, C. Rossi AlvarezVolume:
77-78
Year:
1985
Language:
english
DOI:
10.1016/0022-3093(85)90726-4
File:
PDF, 143 KB
english, 1985