Valency control of P-type a-SiC:H having the optical band gap more than 2.5 eV by electron-cyclotron resonance CVD (ECR CVD)
Yutaka Hattori, Dusit Kruangam, Toshihiko Toyama, Hiroaki Okamoto, Yoshihiro HamakawaVolume:
97-98
Year:
1987
Language:
english
DOI:
10.1016/0022-3093(87)90259-6
File:
PDF, 189 KB
english, 1987