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Lateral growth rates in laser CVD of tungsten microstructures
T. Szörényi, K. Piglmayer, G.Q. Zhang, D. BäuerleVolume:
202
Year:
1988
Language:
english
DOI:
10.1016/0039-6028(88)90046-5
File:
PDF, 1.11 MB
english, 1988