![](/img/cover-not-exists.png)
Reactions of laser-generated CF2 on silicon and silicon oxide surfaces
J.G. Langan, J.A. Shorter, Xu Xin, S.A. Joyce, J.I. SteinfeldVolume:
207
Year:
1989
Language:
english
DOI:
10.1016/0039-6028(89)90127-1
File:
PDF, 613 KB
english, 1989